A surface micromachining technology for building microelectromechanical sensor and actuator systems in silicon stands out for its ability to fashion suspended structures that are anchored to the ...
Micro-Electro-Mechanical-Systems (MEMS) are three-dimensional structures made using silicon micromachining technologies. They made their first appearance in semiconductor fabs in the sixties and, ...
SCANLAB GmbH, leading supplier for high-end laser scan systems, assures through partnerships minimized integration efforts for its advanced micromachining solution. XL SCAN, which was jointly ...
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