I’ve been talking about double patterning for a long time now in this series of blogs. I thought it might be good to start looking ahead at what is next for multi-patterning (Don’t Panic!). As you may ...

SAN FRANCISCO — Amid probable delays for extreme ultraviolet (EUV) lithography, ASML, Canon and Nikon are updating their roadmaps, racing each other to capitalize on the shift towards ...